2024-03-28T14:32:13Z
https://nagoya.repo.nii.ac.jp/oai
oai:nagoya.repo.nii.ac.jp:00005493
2023-01-16T04:30:10Z
320:321:322
Measurement of oxygen atom density employing vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp
Nagai, Hisao
Hiramatsu, Mineo
Hori, Masaru
Goto, Toshio
open access
Copyright (2003) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
The compact measurement system for absolute density of oxygen (O) atom has been developed, which employs a vacuum ultraviolet absorption spectroscopy (VUVAS) technique with a high-pressure microdischarge hollow cathode lamp (MHCL) as a light source. The influences of self-absorption, emission line profile of the MHCL, and background absorption of oxygen molecule (O_2) on the determination of absolute O atom density were taken into consideration. This system has been applied for measuring absolute O atom densities in an inductively coupled O_2 plasma. O atom densities were estimated to be on the order of 1*10^12–1*10^13 cm^-3 at an input power of 100 W and an O_2 pressure ranging from 1.3 to 26.7 Pa. The behavior of O atom density measured using VUVAS technique was consistent with that obtained by actinometry technique using O emission intensities of 844.6 nm and 777.4 nm lines. Moreover, the lifetime of O atom in the afterglow plasma has been measured. The decay curves of the O atom density were fitted with exponential functions. The extinction process of O atom in the inductively coupled O_2 plasma has been discussed.
American Institute of Physics
2003-07
eng
journal article
VoR
http://hdl.handle.net/2237/7098
https://nagoya.repo.nii.ac.jp/records/5493
https://doi.org/10.1063/1.1582386
0034-6748
Review of Scientific Instruments
74
7
3453
3459
https://nagoya.repo.nii.ac.jp/record/5493/files/RevSciInstrum_74_3453.pdf
application/pdf
224.5 kB
2018-02-19