2024-03-29T09:59:26Z
https://nagoya.repo.nii.ac.jp/oai
oai:nagoya.repo.nii.ac.jp:00005501
2023-01-16T03:50:08Z
320:502:503
Transition from Electrostatic to Electromagnetic Mode in Atmospheric Pressure RF Ar Inductively Coupled Plasma
Razzak, M. A.
Kondo, K.
Uesugi, Y.
Takamura, S.
open access
Copyright © 2003 IEEE. Reprinted from Plasma Science, 2003. ICOPS 2003. p.446. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org.
IEEE
2003
eng
journal article
VoR
http://hdl.handle.net/2237/7110
https://nagoya.repo.nii.ac.jp/records/5501
https://doi.org/10.1109/PLASMA.2003.1230027
0730-9244
The 30th International Conference on Plasma Science (ICOPS 2003) IEEE Conference Record - Abstracts
446
446
https://nagoya.repo.nii.ac.jp/record/5501/files/icops2003.pdf
application/pdf
9.7 kB
2018-02-19