2024-03-29T14:32:10Z
https://nagoya.repo.nii.ac.jp/oai
oai:nagoya.repo.nii.ac.jp:00007848
2023-01-16T03:53:20Z
320:321:322
Bubble Driven Arrayed Actuator Device for a Tactile Display
Ukai, S.
Imamura, T.
Shikida, M.
Sato, K.
open access
Copyright © 2007 IEEE. Reprinted from (relevant publication info). This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org.
Bubble
Tactile display
PDMS
Parylene-C
We designed and made a micro meter sized arrayed actuator device for use in a tactile display. Each actuator uses a liquid-vapor phase change to drive a micro needle that stimulates receptors in a finger that is in contact with the array. The actuators consists of a flexible diaphragm structure and a bottom plate, which are bonded to create a cavity between them. A micro needle and a micro heater are formed on the diaphragm and the plate, respectively, of each actuator, and the sealed cavity that is thereby created is filled with an operating liquid. We manually assembled these components to form a 3x3 arrayed actuator device, 15x15x1 mm in size. Increasing the pressure in the cavity by activating the heater and generating bubbles, deformes the flexible membrane and drives the needle upwards. We experimentally evaluated the device and obtained a large needle displacement (61μm) with 457-mJ input energy. This magnitude of displacement should easily stimulate receptors on the tips of fingers.
IEEE
2007
eng
journal article
VoR
http://hdl.handle.net/2237/9568
https://nagoya.repo.nii.ac.jp/records/7848
https://doi.org/10.1109/SENSOR.2007.4300597
1-4244-0842-3
Solid-State Sensors, Actuators and Microsystems Conference
2171
2174
https://nagoya.repo.nii.ac.jp/record/7848/files/shik_12.pdf
application/pdf
344.1 kB
2018-02-19