2024-03-28T11:27:27Z
https://nagoya.repo.nii.ac.jp/oai
oai:nagoya.repo.nii.ac.jp:00029021
2023-01-16T04:59:12Z
320:321:322
Tuning the Electrical Properties of Titanium Oxide Bilayers Prepared by Atomic Layer Deposition at Different Temperatures
Gotoh, Kazuhiro
Mochizuki, Takeya
Kurokawa, Yasuyoshi
Usami, Noritaka
open access
This is the peer reviewed version of the following article: [Gotoh, K., Mochizuki, T., Kurokawa, Y. and Usami, N. (2019), Tuning the Electrical Properties of Titanium Oxide Bilayers Prepared by Atomic Layer Deposition at Different Temperatures. Phys. Status Solidi A, 216: 1900495. doi:10.1002/pssa.201900495], which has been published in final form at [https://doi.org/10.1002/pssa.201900495]. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Use of Self-Archived Versions.
atomic layer deposition
crystalline silicon
passivation
titanium oxide
Carrier‐selective contacts prepared by atomic layer deposition (ALD) have received significant attention for developing high‐efficiency solar cells. Herein, the electrical properties of titanium oxide (TiOx) prepared by ALD are manipulated by modulating the deposition temperature during ALD. Tunable electrical properties are possible due to the existence of oxygen vacancies in TiOx prepared at low deposition temperatures. TiOx layers prepared at 100 and 150 °C provide a low contact resistivity and high passivation performance, respectively. A high carrier selectivity of 13.5 is achieved by stacking the TiOx layers prepared at 100 and 150 °C, compared with a single TiOx layer. Modulating the deposition temperature can, therefore, improve the electrical properties of ALD‐TiOx. This approach can be used to optimize the functionality of ALD‐based materials.
ファイル公開:2020-11-01
Wiley
2019-11
eng
journal article
AM
http://hdl.handle.net/2237/00031208
https://nagoya.repo.nii.ac.jp/records/29021
https://doi.org/10.1002/pssa.201900495
1862-6300
physica status solidi (a)
216
22
1900495
https://nagoya.repo.nii.ac.jp/record/29021/files/PSSA_Stack_final.pdf
application/pdf
1.0 MB
2020-11-01