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Dynamics of E-H mode transition in high-pressure RF inductively coupled plasmas
Razzak, M. Abdur
13140
Takamura, Shuichi
13141
Uesugi, Yoshihiko
13142
E-H mode transition dynamics
high-speed imaging
inductively coupled plasma
Capacitive (E) to inductive (H) mode transition dynamics in radio frequency (RF) argon inductively coupled plasmas (ICPs) with up to atmospheric pressure is studied experimentally. High-speed imaging (13500 fps) is performed to investigate the transition dynamics, and to estimate the characteristic time scale of E-H mode transition. The effect of diatomic gas inclusion (here N2) on the E-H mode transition dynamics is also discussed.
journal article
IEEE
2005-04
application/pdf
IEEE Transactions on Plasma Science
2
33
284
285
http://hdl.handle.net/2237/6794
https://nagoya.repo.nii.ac.jp/record/5210/files/01420438.pdf
eng
https://doi.org/10.1109/TPS.2005.845019
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