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Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas
Sasaki, K.
13733
Kawai, Y.
13734
Kadota, K.
13735
Absolute densities of fluorine (F) atoms at the ground state (2p^5 ^2P°) were measured in helicon-wave excited high-density CF_4 plasmas by vacuum ultraviolet (VUV) absorption spectroscopy. By employing an electron cyclotron resonance CF_4 plasma as a light source in the VUV wavelength range, an absorption spectroscopy system with no vacuum windows was constructed. As a result, the density of F atoms was approximately 1*10^13 cm^-3 for an rf power of 1 kW and a CF_4 gas pressure of 2.5 mTorr, which was one-order higher than the density of CF_x radicals and was one-order lower than the density of the parent gas.
journal article
American Institute of Physics
1997-03-17
application/pdf
Applied Physics Letters
11
70
1375
1377
http://hdl.handle.net/2237/6989
0003-6951
https://nagoya.repo.nii.ac.jp/record/5384/files/ApplPhysLett_70_1375.pdf
eng
https://doi.org/10.1063/1.118582
Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.