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2023-01-16T03:49:56Z
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Effects of H, OH, and CH_3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor
Ikeda, M.
13900
Ito, H.
13901
Hiramatsu, M.
13902
Hori, M.
13903
Goto, T.
13904
Diamond films were successfully synthesized in both parallel-plate radio frequency (rf: 13.56 MHz) CH_4 and CH_3OH plasmas with injection of H and OH radicals generated in the remote microwave (2.45 GHz) H_2 /H_2O plasma. Effects of H, OH, and CH_3 radicals on the diamond film formation in the rf plasma reactor were investigated by the formation of diamond films employing radical injection technique and the measurement of density in the plasma. Under the condition of diamond film formation, CH_3 density was measured by infrared diode laser absorption spectroscopy (IRLAS). The kinetics of CH_3 in rf CH_4 and CH_3OH plasmas with injection of H and OH radicals were evaluated from the results of optical emission spectroscopy and lifetime of CH_3 radicals estimated by IRLAS.
journal article
American Institute of Physics
1997-10-15
application/pdf
Journal of Applied Physics
8
82
4055
4061
http://hdl.handle.net/2237/7026
0021-8979
https://nagoya.repo.nii.ac.jp/record/5421/files/JApplPhys_82_4055.pdf
eng
https://doi.org/10.1063/1.365715
Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.