2024-03-28T14:48:00Z
https://nagoya.repo.nii.ac.jp/oai
oai:nagoya.repo.nii.ac.jp:00012039
2023-01-16T03:58:41Z
320:321:322
Micro-Machined Stent-Type Flow Sensor for Evaluation of Nasal Respiration
Yokota, T
38177
Naito, J
38178
Shikida, M
38179
Sato, K
38180
We present a thermal flow sensor that is suitable for measuring nasal respiration. To fix the flow sensor inside the nasal passage, we integrated it onto a stent structure, which is normally used as a medical device. The sensor was monolithically integrated on the Ti substrate by applying photolithography and wet etching processes. The developed fabrication has advantage that it is able to fabricate the both of the cavity for the thermal isolation and the stent structure during the same process. We mounted the flow sensor onto the inner surface of the silicone tube by inflating the balloon tube. The mechanical strength of the cylindrical stent under the compression condition was also studied, and it showed an elastic deformation when the force was less than 0.08 N. The developed flow sensor could detect the flow direction at the flow range of 0-2000 ccm. A response time of less than 260 msec was obtained by forming a cavity under the sensor.
journal article
IEEE
2009-01-25
application/pdf
IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS 2009)
495
498
http://hdl.handle.net/2237/13915
http://dx.doi.org/10.1109/MEMSYS.2009.4805427
1084-6999
https://nagoya.repo.nii.ac.jp/record/12039/files/09_MEMS_Yokota.pdf
eng
https://doi.org/10.1109/MEMSYS.2009.4805427
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