2024-03-29T15:08:13Z
https://nagoya.repo.nii.ac.jp/oai
oai:nagoya.repo.nii.ac.jp:00012605
2023-01-16T03:59:24Z
320:321:322
Structure Modification of M-AFM Probe for the Measurement of Local Conductivity
Fujimoto, Akifumi
39659
Zhang, Lan
39660
Hosoi, Atsushi
39661
Ju, Yang
39662
In order to realize the evaluation of electrical properties of materials in nanoscale orders, a method for the measurement of local conductivity was presented. A microwave atomic force microscope (M-AFM) probe in which microwave signals can propagate was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam (FIB) fabrication. The microwave measurement system consisted of the combination of a network analyzer working at 44.5 GHz and an AFM were used to measure the samples without contact. The amplitude and phase of the reflection coefficient of the microwave signal were measured to determine the electrical conductivity of non magnetic metals. The conductivity obtained by this method agrees with that measured by the high-frequency conductometry.
journal article
IEEE
2010
application/pdf
Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP)
22
26
http://hdl.handle.net/2237/14489
http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5486451&isnumber=5486443
https://nagoya.repo.nii.ac.jp/record/12605/files/1056.pdf
eng
http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5486451&isnumber=5486443
978-1-4244-6636-8
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