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2023-01-16T04:12:47Z
320:321:322
Direct fabrication of Cu/Cu2O composite micro-temperature sensor using femtosecond laser reduction patterning
Mizoshiri, Mizue
68409
Ito, Yasuaki
68410
Arakane, Shun
68411
Sakurai, Junpei
68412
Hata, Seiichi
68413
Micro-temperature sensors, which composed of a Cu2O-rich sensing part and two Cu-rich electrodes, were directly fabricated by femtosecond laser reduction patterning of CuO nanoparticles. Patterning of the microstructures was performed by laser scanning with pitches of 5, 10, and 15 µm. Cu2O-rich micropatterns were formed at the laser scan speed of 1 mm/s, the pitch of 5 µm, and the pulse energy of 0.54 nJ. Cu-rich micropatterns that had high generation selectivity of Cu against Cu2O were fabricated at the laser scan speed of 15 mm/s, the pitch of 5 µm, and the pulse energy of 0.45 nJ. Electrical resistivities of the Cu2O- and Cu-rich micropatterns were approximately 10 Ω m and 9 µΩ m, respectively. The temperature coefficient of the resistance of the micro-temperature sensor fabricated under these laser irradiation conditions was −5.5 × 10−3/°C. This resistance property with a negative value was consistent with that of semiconductor Cu2O.
journal article
IOP publishing
2016-06
application/pdf
Japanese Journal of Applied Physics
6S1
55
06GP05
06GP05
http://dx.doi.org/10.7567/JJAP.55.06GP05
http://hdl.handle.net/2237/25275
0021-4922
https://nagoya.repo.nii.ac.jp/record/23085/files/MN15054.pdf
eng
https://doi.org/10.7567/JJAP.55.06GP05
© 2016 The Japan Society of Applied Physics