2024-03-29T06:19:11Z
https://nagoya.repo.nii.ac.jp/oai
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2023-01-16T04:17:00Z
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Electrical contact properties between carbon nanotube ends and a conductive atomic force microscope tip
Inaba, Masafumi
87049
Ohara, Kazuyoshi
87050
Shibuya, Megumi
87051
Ochiai, Takumi
87052
Yokoyama, Daisuke
87053
Norimatsu, Wataru
87054
Kusunoki, Michiko
87055
Kawarada, Hiroshi
87056
Understanding the electrical contact properties of carbon nanotube (CNT) ends is important to use the high conductance of CNTs in the CNT on-axis direction in applications such as through-silicon via structures. In this study, we experimentally evaluated the contact resistivity between single-/multi-walled CNT ends and a metal nanoprobe using conductive atomic force microscopy (C-AFM). To validate the measured end contact resistivity, we compared our experimentally determined value with that obtained from numerical calculations and reported values for side contact resistivity. The contact resistivity normalized by the length of the CNT ends was 0.6–2.4 × 10^6 Ω nm for single-walled CNTs. This range is 1–2 orders of magnitude higher than that determined theoretically. The contact resistivity of a single-walled CNT end with metal normalized by the contact area was 2–3 orders of magnitude lower than that reported for the resistivity of a CNT sidewall/metal contact. For multi-walled CNTs, the measured contact resistivity was one order of magnitude higher than that of a CNT forest grown by remote plasma-enhanced chemical vapor deposition, whereas the contact resistivity of a top metal electrode was similar to that obtained for a single-walled CNT forest.
ファイル公開:2019/06/28
journal article
AIP Publishing
2018-06-28
application/pdf
Journal of Applied Physics
24
123
244502
0021-8979
1089-7550
https://nagoya.repo.nii.ac.jp/record/26422/files/1_5027849.pdf
eng
https://doi.org/10.1063/1.5027849
Copyright 2018 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing.The following article appeared in (Journal of Applied Physics. v.123, 2018, p.244502) and may be found at (http://dx.doi.org/10.1063/1.5027849).