2024-03-29T02:15:53Z
https://nagoya.repo.nii.ac.jp/oai
oai:nagoya.repo.nii.ac.jp:02001420
2023-01-16T05:14:50Z
320:321:322
Time-dependent measurement of charge density on the bottom of high aspect capillary hole in pulse-modulated VHF capacitively coupled Ar plasma
Moriyama, Makoto
Nakahara, Naoya
Kurihara, Kazuaki
Iino, Daiki
Fukumizu, Hiroyuki
Suzuki, Haruka
Toyoda, Hirotaka
high-aspect hole
charge-up
VHF plasma
pulse-modulated plasma
charging current
Charging and discharging behavior of high aspect-ratio (AR) hole capillary plate (CP) exposed to a pulse-modulated very high frequency (VHF) capacitively-coupled plasma is investigated. From an equivalent circuit model, time-dependent charge density on the bottom of the CP is quantitatively evaluated. AR of the CP plays very important role for the charging current, although the discharge current is dominated by the leakage current of the CP. Importance of electron current flowing into the CP bottom during the VHF pulse-on phase is suggested at higher self-bias voltages.
journal article
IOP publishing
2021-01
application/pdf
Japanese Journal of Applied Physics
1
60
016001
0021-4922
https://nagoya.repo.nii.ac.jp/record/2001420/files/repository_moriyama.pdf
eng
https://doi.org/10.35848/1347-4065/abd0ca
This is the Accepted Manuscript version of an article accepted for publication in [Japanese Journal of Applied Physics]. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at [https://doi.org/10.35848/1347-4065/abd0ca]