2024-03-28T08:10:52Z
https://nagoya.repo.nii.ac.jp/oai
oai:nagoya.repo.nii.ac.jp:02002178
2023-01-16T04:44:24Z
673:674:675
Vertical GaN p+-n junction diode with ideal avalanche capability grown by halide vapor phase epitaxy
Ohnishi, Kazuki
Kawasaki, Seiya
Fujimoto, Naoki
Nitta, Shugo
Watanabe, Hirotaka
Honda, Yoshio
Amano, Hiroshi
A vertical GaN p^+-n junction diode with an ideal breakdown voltage was grown by halide vapor phase epitaxy (HVPE). A steep p^+-n interface was observed even with the use of the HVPE method. No Si-accumulating layer was formed at the p^+-n interface because of the continuous HVPE growth from the n-type drift layer to the p-type layer. This method provides improved electrical properties compared with the regrowth of p-type GaN layers. The minimum ideality factor of approximately 1.6 was obtained. The breakdown voltage increased from 874 to 974 V with the increase in the temperature from 25 to 200 °C, which suggests that avalanche multiplication causes the breakdown. The temperature-dependent breakdown voltage was in good agreement with the breakdown voltage calculated using the ideal critical electric field. These results indicate that HVPE is promising for the fabrication of vertical GaN power devices.
journal article
AIP Publishing
2021-10-12
application/pdf
Applied Physics Letters
15
119
152102
0003-6951
https://nagoya.repo.nii.ac.jp/record/2002178/files/5_0066139.pdf
eng
https://doi.org/10.1063/5.0066139
Copyright 2021 Author(s). Published under an exclusive license by AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing.The following article appeared in (Appl. Phys. Lett. 119, 152102 (2021)) and may be found at (https://doi.org/10.1063/5.0066139).