@article{oai:nagoya.repo.nii.ac.jp:00010161,
 author = {Yamashita, Masatsugu and Otani, Chiko and Kawase, Kodo and Nikawa, Kiyoshi and Tonouchi, Masayoshi},
 journal = {APPLIED PHYSICS LETTERS},
 month = {Jul},
 note = {We have proposed and demonstrated a novel technique for the noncontact inspection of electrical failures in semiconductor devices using a laser terahertz emission microscope. It was found that the waveforms of the terahertz pulses, emitted by exciting p-n junctions in semiconductor circuits with focused ultrafast laser pulses, depend on the interconnection structures of the circuits. We successfully distinguished damaged silicon metal-oxide-semiconductor field effect transistor circuits with disconnected wires from normal ones by comparing the images of terahertz emission amplitudes between a normal chip and a defective one.},
 pages = {041117--041117},
 title = {Noncontact inspection technique for electrical failures in semiconductor devices using a laser terahertz emission microscope},
 volume = {93},
 year = {2008}
}