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  1. B200 工学部/工学研究科
  2. B200d 学位論文
  3. 博士論文(工博・論工博)

BEHAVIOUR OF IONS IN AN RF PLASMA

http://hdl.handle.net/2237/12411
http://hdl.handle.net/2237/12411
9bdaf989-c3d9-46cd-91e1-54aa55d8313a
名前 / ファイル ライセンス アクション
ko0655.pdf ko0655.pdf (4.2 MB)
ko0655_abstr.pdf ko0655_abstr.pdf (461.4 kB)
Item type 学位論文 / Thesis or Dissertation(1)
公開日 2009-12-16
タイトル
タイトル BEHAVIOUR OF IONS IN AN RF PLASMA
言語 en
その他のタイトル
その他のタイトル 高周波プラズマ中のイオンの挙動
言語 ja
著者 岡本, 幸雄

× 岡本, 幸雄

WEKO 32013

ja 岡本, 幸雄

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OKAMOTO, Yukio

× OKAMOTO, Yukio

WEKO 32014

en OKAMOTO, Yukio

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
抄録
内容記述 The design and the construction of the electrostatic energy analyzer for low energy of about 10 eV charged particles (resolution is 170), and the quadrupole mass filter with maximum resolving power 100 for 300 eV ions are described. Accurate energy distributions for each species are obtained. Ion temperature and density ratio of each ion species for steady-state RF plasma are also determined. The technique described here makes possible to obtain the definitive information about the microscopic properties of plasma: if the energy distribution for ions has no minimum (such as the Maxwellian distribution), there is no instability, while the presence of a deep-enough minimum, such as double-hump in the distribution function, leads to an electrostatic instability. Also, it makes possible a more definitive study of the ion extraction mechanism from the plasma, which is described in detail.
言語 en
内容記述タイプ Abstract
内容記述
内容記述 名古屋大学博士学位論文 学位の種類:工学博士(課程) 学位授与年月日:昭和46年6月14日
言語 ja
内容記述タイプ Other
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_db06
タイプ doctoral thesis
書誌情報
発行日 1971-06-14
学位名
言語 ja
学位名 工学博士
学位授与機関
学位授与機関識別子Scheme kakenhi
学位授与機関識別子 13901
言語 ja
学位授与機関名 名古屋大学
言語 en
学位授与機関名 Nagoya University
学位授与年度
学位授与年度 1971
学位授与年月日
学位授与年月日 1971-06-14
学位授与番号
学位授与番号 甲第655号
フォーマット
application/pdf
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/12411
識別子タイプ HDL
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