{"_buckets": {"deposit": "107869cf-130d-4ff8-94d0-9f07f43d438e"}, "_deposit": {"id": "10568", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "10568"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00010568"}, "item_12_alternative_title_19": {"attribute_name": "\u305d\u306e\u4ed6\u306e\u8a00\u8a9e\u306e\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_alternative_title": "\u9ad8\u5468\u6ce2\u30d7\u30e9\u30ba\u30de\u4e2d\u306e\u30a4\u30aa\u30f3\u306e\u6319\u52d5"}]}, "item_12_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1971-06-14", "bibliographicIssueDateType": "Issued"}, "bibliographic_titles": [{}]}]}, "item_12_date_granted_64": {"attribute_name": "\u5b66\u4f4d\u6388\u4e0e\u5e74\u6708\u65e5", "attribute_value_mlt": [{"subitem_dategranted": "1971-06-14"}]}, "item_12_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "The design and the construction of the electrostatic energy analyzer for low energy of about 10 eV charged particles (resolution is 170), and the quadrupole mass\nfilter with maximum resolving power 100 for 300 eV ions are described.\n Accurate energy distributions for each species are obtained. Ion temperature and density ratio of each ion species for steady-state RF plasma are also determined.\n The technique described here makes possible to obtain the definitive information about the microscopic properties of plasma: if the energy distribution for ions\nhas no minimum (such as the Maxwellian distribution), there is no instability, while the presence of a deep-enough minimum, such as double-hump in the distribution\nfunction, leads to an electrostatic instability. Also, it makes possible a more definitive study of the ion extraction mechanism from the plasma, which is described\nin detail.", "subitem_description_type": "Abstract"}]}, "item_12_description_5": {"attribute_name": "\u5185\u5bb9\u8a18\u8ff0", "attribute_value_mlt": [{"subitem_description": "\u540d\u53e4\u5c4b\u5927\u5b66\u535a\u58eb\u5b66\u4f4d\u8ad6\u6587 \u5b66\u4f4d\u306e\u7a2e\u985e:\u5de5\u5b66\u535a\u58eb(\u8ab2\u7a0b) \u5b66\u4f4d\u6388\u4e0e\u5e74\u6708\u65e5:\u662d\u548c46\u5e746\u670814\u65e5", "subitem_description_type": "Other"}]}, "item_12_dissertation_number_65": {"attribute_name": "\u5b66\u4f4d\u6388\u4e0e\u756a\u53f7", "attribute_value_mlt": [{"subitem_dissertationnumber": "13901\u7532\u7b2c655\u53f7"}]}, "item_12_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/12411"}]}, "item_12_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_12_text_14": {"attribute_name": "\u30d5\u30a9\u30fc\u30de\u30c3\u30c8", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}, {"subitem_text_value": "application/pdf"}]}, "item_12_text_63": {"attribute_name": "\u5b66\u4f4d\u6388\u4e0e\u5e74\u5ea6", "attribute_value_mlt": [{"subitem_text_value": "1971"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "\u5ca1\u672c, \u5e78\u96c4"}], "nameIdentifiers": [{"nameIdentifier": "32013", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "OKAMOTO, Yukio"}], "nameIdentifiers": [{"nameIdentifier": "32014", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-20"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "ko0655.pdf", "filesize": [{"value": "4.2 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 4200000.0, "url": {"label": "ko0655.pdf ", "url": "https://nagoya.repo.nii.ac.jp/record/10568/files/ko0655.pdf"}, "version_id": "e329b1ab-2081-4936-b966-2b4b4bf06a2a"}, {"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-20"}], "displaytype": "detail", "download_preview_message": "", "file_order": 1, "filename": "ko0655_abstr.pdf", "filesize": [{"value": "461.4 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 461400.0, "url": {"label": "ko0655_abstr.pdf ", "url": "https://nagoya.repo.nii.ac.jp/record/10568/files/ko0655_abstr.pdf"}, "version_id": "36c839a5-6e7c-4352-8226-4ffb7baa29b1"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "thesis", "resourceuri": "http://purl.org/coar/resource_type/c_46ec"}]}, "item_title": "BEHAVIOUR OF  IONS IN AN RF PLASMA", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "BEHAVIOUR OF  IONS IN AN RF PLASMA"}]}, "item_type_id": "12", "owner": "1", "path": ["320/606/607"], "permalink_uri": "http://hdl.handle.net/2237/12411", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_value": "2009-12-16"}, "publish_date": "2009-12-16", "publish_status": "0", "recid": "10568", "relation": {}, "relation_version_is_last": true, "title": ["BEHAVIOUR OF  IONS IN AN RF PLASMA"], "weko_shared_id": null}