@phdthesis{oai:nagoya.repo.nii.ac.jp:00010568,
 author = {岡本, 幸雄 and OKAMOTO, Yukio},
 month = {Jun},
 note = {The design and the construction of the electrostatic energy analyzer for low energy of about 10 eV charged particles (resolution is 170), and the quadrupole mass filter with maximum resolving power 100 for 300 eV ions are described.  Accurate energy distributions for each species are obtained. Ion temperature and density ratio of each ion species for steady-state RF plasma are also determined.  The technique described here makes possible to obtain the definitive information about the microscopic properties of plasma: if the energy distribution for ions has no minimum (such as the Maxwellian distribution), there is no instability, while the presence of a deep-enough minimum, such as double-hump in the distribution function, leads to an electrostatic instability. Also, it makes possible a more definitive study of the ion extraction mechanism from the plasma, which is described in detail., 名古屋大学博士学位論文 学位の種類:工学博士(課程) 学位授与年月日:昭和46年6月14日},
 school = {名古屋大学, Nagoya University},
 title = {BEHAVIOUR OF  IONS IN AN RF PLASMA},
 year = {1971}
}