{"_buckets": {"deposit": "3d5f5ed1-4056-4f2a-8f4b-7695a7be37b2"}, "_deposit": {"id": "11067", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "11067"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00011067", "sets": ["1093"]}, "author_link": ["33551", "33552", "33553", "33554"], "item_1618209983323": {"attribute_name": "助成情報", "attribute_value_mlt": [{"subitem_award_numbers": {"subitem_award_number": "61850069", "subitem_award_uri": "https://kaken.nii.ac.jp/ja/grant/KAKENHI-PROJECT-61850069"}, "subitem_award_titles": [{"subitem_award_title": "球面収差補正用薄膜レンズを用いた走査透過電子顕微鏡の高分解能化に関する研究", "subitem_award_title_language": "ja"}], "subitem_funder_identifiers": {"subitem_funder_identifier": "https://doi.org/10.13039/501100001691", "subitem_funder_identifier_type": "Crossref Funder"}, "subitem_funder_names": [{"subitem_funder_name": "日本学術振興会", "subitem_funder_name_language": "ja"}]}]}, "item_19_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1988-03", "bibliographicIssueDateType": "Issued"}}]}, "item_19_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "電子レンズの球面を補正する薄膜レンズを用いて, 走査透過電子顕微鏡(STEM)の分解能の向上を目指した研究を行い, 次の成果を得た. 1.薄膜レンズの寿命を決める要因である電子線照射による薄膜の汚染を軽減するため, STEMの真空排気系の改造を行った結果, 50時間程度の連続使用によっても顕著な汚染の認められない, 清浄な真空が得られた. 2.薄膜レンズをSTEMのプロブフォーミングレンズの補正に用いたときの特性を, 数値計算により調べた. その結果, プローブフォーミイングレンズ主面付近に薄膜レンズを配置すれば, 従来3次球面収差補正時の分解能を決める要因であった5次球面収差を, 無視できる大きさに抑えられることが分かった. この計算結果に基づき, プローブフォーミイングレンズのポールピース内に組込み可能な薄膜レンズを設計・制作した. 3.薄膜により散乱されて像のバックグラウンドノイズとなる電子を, 試料からの散乱電子を失うことなく減少させるため, 試料の共役面に制限視野絞りを置いた. 薄膜で散乱された電子のうちこの絞りで除かれるものの割合はたとえば視野を37μmに制限する絞りを用いたとき, 約40%であった. 4.補正による像質の向上を定量化するため, 像をデジタル化し, そのSN比を最尤推定法により求めるシステムを開発した. 5.新しく設計した. 薄膜レンズを用いて実際にSTEM像をとり, 像のSN比の変化を測定した. SN比は薄膜レンズの動作により向上し, 球面収差補正によるSTEM像の改善を定量的に実証できた. 6.工作精度の不足によって生ずる非回転対称収差の分解能への影響を, プローブ強度ぶんぷの計算により検討した. その結果, 薄膜レンズの工作精度を10倍向上させることができば, 通常形透過電子顕微鏡に匹敵する分解能のSTEMを実現できることが分かった.", "subitem_description_language": "ja", "subitem_description_type": "Abstract"}]}, "item_19_description_5": {"attribute_name": "内容記述", "attribute_value_mlt": [{"subitem_description": "科学研究費補助金 研究種目:試験研究 課題番号:61850069 研究代表者:日比野 倫夫 研究期間:1986-1987年度", "subitem_description_language": "ja", "subitem_description_type": "Other"}]}, "item_19_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/12928"}]}, "item_19_relation_40": {"attribute_name": "シリーズ", "attribute_value_mlt": [{"subitem_relation_name": [{"subitem_relation_name_text": "科学研究費補助金;試験研究;61850069"}]}]}, "item_19_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_19_text_14": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "日比野, 倫夫", "creatorNameLang": "ja"}], "nameIdentifiers": [{"nameIdentifier": "33551", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "花井, 孝明", "creatorNameLang": "ja"}], "nameIdentifiers": [{"nameIdentifier": "33552", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "杉山, せつ子", "creatorNameLang": "ja"}], "nameIdentifiers": [{"nameIdentifier": "33553", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "下山, 宏", "creatorNameLang": "ja"}], "nameIdentifiers": [{"nameIdentifier": "33554", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-20"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "61850069.pdf", "filesize": [{"value": "1.8 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 1800000.0, "url": {"label": "61850069.pdf", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/11067/files/61850069.pdf"}, "version_id": "d0f8d964-5b09-4cf8-b350-ed9aae6b394f"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "電子レンズ", "subitem_subject_scheme": "Other"}, {"subitem_subject": "走査透過電子顕微鏡(STEM)", "subitem_subject_scheme": "Other"}, {"subitem_subject": "薄膜レンズ", "subitem_subject_scheme": "Other"}, {"subitem_subject": "球面収差", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Electron lens", "subitem_subject_scheme": "Other"}, {"subitem_subject": "SN比", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Foil Lend", "subitem_subject_scheme": "Other"}, {"subitem_subject": "分解能", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Recolution", "subitem_subject_scheme": "Other"}, {"subitem_subject": "球面収差補正", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Scanning Transmission Election Microscopy (STEM)", "subitem_subject_scheme": "Other"}, {"subitem_subject": "電子プローブ", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Shperical aberration", "subitem_subject_scheme": "Other"}, {"subitem_subject": "収差補正", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Correction", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Electron Probe", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "research report", "resourceuri": "http://purl.org/coar/resource_type/c_18ws"}]}, "item_title": "球面収差補正用薄膜レンズを用いた走査透過電子顕微鏡の高分解能化に関する研究", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "球面収差補正用薄膜レンズを用いた走査透過電子顕微鏡の高分解能化に関する研究", "subitem_title_language": "ja"}]}, "item_type_id": "19", "owner": "1", "path": ["1093"], "permalink_uri": "http://hdl.handle.net/2237/12928", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2010-03-12"}, "publish_date": "2010-03-12", "publish_status": "0", "recid": "11067", "relation": {}, "relation_version_is_last": true, "title": ["球面収差補正用薄膜レンズを用いた走査透過電子顕微鏡の高分解能化に関する研究"], "weko_shared_id": -1}