{"created":"2021-03-01T06:18:00.304388+00:00","id":11131,"links":{},"metadata":{"_buckets":{"deposit":"8729300a-2943-41c6-9d8f-5fb6de89a656"},"_deposit":{"id":"11131","owners":[],"pid":{"revision_id":0,"type":"depid","value":"11131"},"status":"published"},"_oai":{"id":"oai:nagoya.repo.nii.ac.jp:00011131","sets":["320:1092:1093"]},"author_link":["33686","33687","33688"],"item_1618209983323":{"attribute_name":"助成情報","attribute_value_mlt":[{"subitem_award_numbers":{"subitem_award_number":"04452103","subitem_award_uri":"https://kaken.nii.ac.jp/ja/grant/KAKENHI-PROJECT-04452103"},"subitem_award_titles":[{"subitem_award_title":"高感度・高解像度元素マッピング像観察の研究","subitem_award_title_language":"ja"}],"subitem_funder_identifiers":{"subitem_funder_identifier":"https://doi.org/10.13039/501100001691","subitem_funder_identifier_type":"Crossref Funder"},"subitem_funder_names":[{"subitem_funder_name":"日本学術振興会","subitem_funder_name_language":"ja"}]}]},"item_19_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1994-03","bibliographicIssueDateType":"Issued"}}]},"item_19_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"1.元素マッピング専用検出器の開発:(1)検出システムの構築;パラレル電子エネルギ-損失分光法(PEELS)と走査透過電子顕微鏡(STEM)を組み合わせて,元素濃度を像の濃淡として表す元素マッピング法を高速に行うため,35チャンネルと少ない素子数のフォトダイオ-ドアレイ(PDA)を用いてエネルギ-損失スペクトルをコンピュ-タに取り込み,元素マッピング像を表示する検出器,制御・増幅回路及びソフトウェアからなるシステムを開発した.1 画素当たりのスペクトル獲得時間は約1.2msecと通常の1024チャンネルのPDAより20倍高速である.(2)検出器の基本特性の測定;電子線シンチレ-タからの光が屈折のためにPDAの窓と受光面の間で広がり,大きなチャンネル間クロスト-クとなることを見出した.その対策として窓のないPDAを用意し,光の漏れを低減した結果,チャンネル間クロスト-クは4%と低い値とすることができた.また,検出器の検出量子効率(DQE)を測定し,実際に元素マッピングを行う低い電子強度では検出回路における電磁的擾乱のためDQEが低下しており,より強力な電磁シ-ルドを行う必要があることが分った. 2.薄膜レンズを用いた球面収差補正による高電流密度電子プロ-ブの実現:散乱断面積の低い高エネルギ-損失の内殻励起エッジを用いて高解像度元素マッピングを行うために,電子レンズの球面収差を薄膜レンズを用いて補正できることを実験と計算により明らかにし,高電流密度の微小電子プロ-ブを実現した. 3.元素マッピング像の観察:実際にカ-ボンマイクログリッド上の窒化ボロンの元素マッピング像を観察し,カ-ボンと窒素・ボロンの分離された像を得た. また,酸化ニッケルを観察した結果,スペクトル強度の低い酸素やニッケルについてもマッピング像が得られ,PEELSを用いた高感度の元素マッピングが達成できた.","subitem_description_language":"ja","subitem_description_type":"Abstract"}]},"item_19_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"科学研究費補助金 研究種目:一般研究(B) 課題番号:04452103 研究代表者:日比野 倫夫 研究期間:1992-1993年度","subitem_description_language":"ja","subitem_description_type":"Other"}]},"item_19_identifier_60":{"attribute_name":"URI","attribute_value_mlt":[{"subitem_identifier_type":"HDL","subitem_identifier_uri":"http://hdl.handle.net/2237/13002"}]},"item_19_relation_40":{"attribute_name":"シリーズ","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"科学研究費補助金報告書;一般研究(B);04452103"}]}]},"item_19_select_15":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_19_text_14":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_text_value":"application/pdf"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"open access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_abf2"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"日比野, 倫夫","creatorNameLang":"ja"}],"nameIdentifiers":[{"nameIdentifier":"33686","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"花井, 孝明","creatorNameLang":"ja"}],"nameIdentifiers":[{"nameIdentifier":"33687","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"杉山, せつ子","creatorNameLang":"ja"}],"nameIdentifiers":[{"nameIdentifier":"33688","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-02-20"}],"displaytype":"detail","filename":"04452103.pdf","filesize":[{"value":"2.0 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"04452103.pdf","objectType":"fulltext","url":"https://nagoya.repo.nii.ac.jp/record/11131/files/04452103.pdf"},"version_id":"a3a71df4-efb0-4cf9-8fd1-99832a764b12"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"球面収差補正","subitem_subject_scheme":"Other"},{"subitem_subject":"薄膜レンズ","subitem_subject_scheme":"Other"},{"subitem_subject":"パラレル電子エネルギ- 損失分光法","subitem_subject_scheme":"Other"},{"subitem_subject":"走査透過電子顕微鏡","subitem_subject_scheme":"Other"},{"subitem_subject":"検出量子効率","subitem_subject_scheme":"Other"},{"subitem_subject":"元素マッピング像","subitem_subject_scheme":"Other"},{"subitem_subject":"走査透過電子顕微鏡法","subitem_subject_scheme":"Other"},{"subitem_subject":"scanning transmission electron microscopy (STEM)","subitem_subject_scheme":"Other"},{"subitem_subject":"foil lens","subitem_subject_scheme":"Other"},{"subitem_subject":"元素マッピング","subitem_subject_scheme":"Other"},{"subitem_subject":"spherical aberration correction","subitem_subject_scheme":"Other"},{"subitem_subject":"電子エネルギ-損失分光法","subitem_subject_scheme":"Other"},{"subitem_subject":"電子プロ-ブ","subitem_subject_scheme":"Other"},{"subitem_subject":"electron energy loss spectroscopy (EELS)","subitem_subject_scheme":"Other"},{"subitem_subject":"elemental mapping","subitem_subject_scheme":"Other"},{"subitem_subject":"detective quantum efficiency (DQE)","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"research 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