@article{oai:nagoya.repo.nii.ac.jp:00012090, author = {Hida, H. and Inagaki, N. and Koyama, M. and Shikida, M. and Sato, K.}, journal = {International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2009)}, month = {Jun}, note = {We developed the novel type of droplet generator for the bio-chemical reactions, and designed it by considering Reynolds and Weber numbers. The Si droplet generator was fabricated on a silicon-on-insulator wafer by using deep-reactive ion etching and was fixed in a piece of heat-shrinkable tubing by heating the tubing. We experimentally confirmed that the fabricated droplet generator formed droplets in 1 mm diameter with jetting.}, pages = {386--389}, title = {Micromachined tube-type of Si droplet generator}, year = {2009} }