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Gas-Liquid Separated Resonator for Bio-Chemical Application
http://hdl.handle.net/2237/13969
http://hdl.handle.net/2237/139699cbb536e-5474-48f7-bb06-f07461146b06
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
No2.pdf (771.4 kB)
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| アイテムタイプ | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2010-08-04 | |||||
| タイトル | ||||||
| タイトル | Gas-Liquid Separated Resonator for Bio-Chemical Application | |||||
| 言語 | en | |||||
| 著者 |
Hida, H.
× Hida, H.× Shikida, M.× Okochi, M.× Honda, H.× Sato, K. |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 権利情報 | ©2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. | |||||
| 言語 | en | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We have developed a novel type of gas-liquid separated micro-resonator for measuring the multifunctional characteristics of biological cells. The resonator consists of an area for the resonator/sensor (gas-phase) and one for the biochemical substance (liquid-phase), with a water-shedding wall separating them. The specimen support extends from the sensor body and passes through the water-shedding wall to the inside of the sample chamber We fabricated the comb-drive resonator on a silicon-on-insulator (SOI) wafer by using a deep reactive ion etching process and resonated it at around 2.5 kHz. Experimental results confirmed that the water-shedding wall was able to prevent solution leakage at the gap between the wall and the support. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | IEEE | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1109/MEMSYS.2009.4805532 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 1084-6999 | |||||
| 書誌情報 |
en : IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS 2009) p. 912-915, 発行日 2009-01-25 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
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| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/13969 | |||||
| 識別子タイプ | HDL | |||||
| URI | ||||||
| 識別子 | http://dx.doi.org/10.1109/MEMSYS.2009.4805532 | |||||
| 識別子タイプ | DOI | |||||
