@article{oai:nagoya.repo.nii.ac.jp:00012091,
 author = {Hida, H. and Shikida, M. and Okochi, M. and Honda, H. and Sato, K.},
 journal = {IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS 2009)},
 month = {Jan},
 note = {We have developed a novel type of gas-liquid separated micro-resonator for measuring the multifunctional characteristics of biological cells. The resonator consists of an area for the resonator/sensor (gas-phase) and one for the biochemical substance (liquid-phase), with a water-shedding wall separating them. The specimen support extends from the sensor body and passes through the water-shedding wall to the inside of the sample chamber We fabricated the comb-drive resonator on a silicon-on-insulator (SOI) wafer by using a deep reactive ion etching process and resonated it at around 2.5 kHz. Experimental results confirmed that the water-shedding wall was able to prevent solution leakage at the gap between the wall and the support.},
 pages = {912--915},
 title = {Gas-Liquid Separated Resonator for Bio-Chemical Application},
 year = {2009}
}