@phdthesis{oai:nagoya.repo.nii.ac.jp:00018018,
 author = {SUZUKI, Toshiya and 鈴木, 俊哉},
 month = {Feb},
 school = {名古屋大学, Nagoya University},
 title = {Studies on Plasma Etching Process Based on Autonomous Control for Nano-meter Fabrication},
 year = {2014}
}