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  1. B200 工学部/工学研究科
  2. B200d 学位論文
  3. 博士論文(工博・論工博)

Studies on control of active species and design of gas molecules for etching of dielectric films in fluorocarbon and related-gas plasmas

http://hdl.handle.net/2237/22438
6d9c7b66-c069-4d5e-b684-a7b6570a5954
名前 / ファイル ライセンス アクション
k11041_abstract.pdf k11041_abstract.pdf (303.8 kB)
k11041_thesis.pdf k11041_thesis.pdf (2.5 MB)
k11041_review.pdf k11041_review.pdf (120.0 kB)
Item type 学位論文 / Thesis or Dissertation(1)
公開日 2015-06-11
タイトル
タイトル Studies on control of active species and design of gas molecules for etching of dielectric films in fluorocarbon and related-gas plasmas
その他のタイトル
その他のタイトル ガスデザインによるフルオロカーボンプラズマ中の活性種及び絶縁膜エッチング特性の制御
著者 KONDO, Yusuke

× KONDO, Yusuke

WEKO 58199

KONDO, Yusuke

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近藤, 祐介

× 近藤, 祐介

WEKO 58200

近藤, 祐介

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言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_46ec
タイプ thesis
書誌情報 発行日 2015-03-25
学位名
学位名 博士(工学)
学位授与機関
学位授与機関名
学位授与機関名 名古屋大学
学位授与年度
学位授与年度 2014
学位授与年月日
学位授与年月日 2015-03-25
学位授与番号
学位授与番号 13901甲第11041号
著者版フラグ
値 ETD
URI
識別子 http://hdl.handle.net/2237/22438
識別子タイプ HDL
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