@phdthesis{oai:nagoya.repo.nii.ac.jp:00019877,
 author = {KONDO, Yusuke and 近藤, 祐介},
 month = {Mar},
 school = {名古屋大学, Nagoya University},
 title = {Studies on control of active species and design of gas molecules for etching of dielectric films in fluorocarbon and related-gas plasmas},
 year = {2015}
}