@phdthesis{oai:nagoya.repo.nii.ac.jp:00019878,
 author = {TSUTSUMI, Takayoshi and 堤, 隆嘉},
 month = {Mar},
 school = {名古屋大学, Nagoya University},
 title = {Study on atomic-scale plasma process based on substrate-temperature control by frequency-domain low-coherence interferometry},
 year = {2015}
}