@phdthesis{oai:nagoya.repo.nii.ac.jp:02000608,
 author = {石, 权 and Shi, Quan},
 month = {Sep},
 school = {名古屋大学, Nagoya University},
 title = {Role of impurity deposition in the formation of silicon nanocone by using low energy helium plasma irradiation},
 year = {2021}
}