ログイン
言語:

WEKO3

  • トップ
  • ランキング
To
lat lon distance
To

Field does not validate



インデックスリンク

インデックスツリー

メールアドレスを入力してください。

WEKO

One fine body…

WEKO

One fine body…

アイテム

{"_buckets": {"deposit": "42aafe33-64aa-4be2-9bf5-0d71bc455c3c"}, "_deposit": {"created_by": 17, "id": "2001420", "owner": "17", "owners": [17], "owners_ext": {"displayname": "図書情報係", "username": "repository"}, "pid": {"revision_id": 0, "type": "depid", "value": "2001420"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:02001420", "sets": ["322"]}, "author_link": [], "control_number": "2001420", "item_1615768549627": {"attribute_name": "出版タイプ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_ab4af688f83e57aa", "subitem_version_type": "AM"}]}, "item_1629683748249": {"attribute_name": "日付", "attribute_value_mlt": [{"subitem_date_issued_datetime": "2022-01-01", "subitem_date_issued_type": "Available"}]}, "item_9_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2021-01", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "1", "bibliographicPageStart": "016001", "bibliographicVolumeNumber": "60", "bibliographic_titles": [{"bibliographic_title": "Japanese Journal of Applied Physics", "bibliographic_titleLang": "en"}]}]}, "item_9_description_4": {"attribute_name": "内容記述", "attribute_value_mlt": [{"subitem_description": "Charging and discharging behavior of high aspect-ratio (AR) hole capillary plate (CP) exposed to a pulse-modulated very high frequency (VHF) capacitively-coupled plasma is investigated. From an equivalent circuit model, time-dependent charge density on the bottom of the CP is quantitatively evaluated. AR of the CP plays very important role for the charging current, although the discharge current is dominated by the leakage current of the CP. Importance of electron current flowing into the CP bottom during the VHF pulse-on phase is suggested at higher self-bias voltages.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_9_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "IOP publishing", "subitem_publisher_language": "en"}]}, "item_9_relation_43": {"attribute_name": "関連情報", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.35848/1347-4065/abd0ca", "subitem_relation_type_select": "DOI"}}]}, "item_9_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "This is the Accepted Manuscript version of an article accepted for publication in [Japanese Journal of Applied Physics]. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at [https://doi.org/10.35848/1347-4065/abd0ca]", "subitem_rights_language": "en"}]}, "item_9_source_id_7": {"attribute_name": "収録物識別子", "attribute_value_mlt": [{"subitem_source_identifier": "0021-4922", "subitem_source_identifier_type": "PISSN"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Moriyama, Makoto", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "Nakahara, Naoya", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "Kurihara, Kazuaki", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "Iino, Daiki", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "Fukumizu, Hiroyuki", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "Suzuki, Haruka", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "Toyoda, Hirotaka", "creatorNameLang": "en"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2022-01-01"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "repository_moriyama.pdf", "filesize": [{"value": "1.1 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "mimetype": "application/pdf", "size": 1100000.0, "url": {"objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/2001420/files/repository_moriyama.pdf"}, "version_id": "218ad4a6-207b-4bfa-bf5d-846a46eae437"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "high-aspect hole", "subitem_subject_scheme": "Other"}, {"subitem_subject": "charge-up", "subitem_subject_scheme": "Other"}, {"subitem_subject": "VHF plasma", "subitem_subject_scheme": "Other"}, {"subitem_subject": "pulse-modulated plasma", "subitem_subject_scheme": "Other"}, {"subitem_subject": "charging current", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Time-dependent measurement of charge density on the bottom of high aspect capillary hole in pulse-modulated VHF capacitively coupled Ar plasma", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Time-dependent measurement of charge density on the bottom of high aspect capillary hole in pulse-modulated VHF capacitively coupled Ar plasma", "subitem_title_language": "en"}]}, "item_type_id": "40001", "owner": "17", "path": ["322"], "permalink_uri": "http://hdl.handle.net/2237/0002001420", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2021-09-10"}, "publish_date": "2021-09-10", "publish_status": "0", "recid": "2001420", "relation": {}, "relation_version_is_last": true, "title": ["Time-dependent measurement of charge density on the bottom of high aspect capillary hole in pulse-modulated VHF capacitively coupled Ar plasma"], "weko_shared_id": -1}
  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Time-dependent measurement of charge density on the bottom of high aspect capillary hole in pulse-modulated VHF capacitively coupled Ar plasma

http://hdl.handle.net/2237/0002001420
http://hdl.handle.net/2237/0002001420
a0b79d08-8add-4a62-a810-930027134413
名前 / ファイル ライセンス アクション
repository_moriyama.pdf repository_moriyama.pdf (1.1 MB)
Item type itemtype_ver1(1)
公開日 2021-09-10
タイトル
タイトル Time-dependent measurement of charge density on the bottom of high aspect capillary hole in pulse-modulated VHF capacitively coupled Ar plasma
言語 en
著者 Moriyama, Makoto

× Moriyama, Makoto

en Moriyama, Makoto

Search repository
Nakahara, Naoya

× Nakahara, Naoya

en Nakahara, Naoya

Search repository
Kurihara, Kazuaki

× Kurihara, Kazuaki

en Kurihara, Kazuaki

Search repository
Iino, Daiki

× Iino, Daiki

en Iino, Daiki

Search repository
Fukumizu, Hiroyuki

× Fukumizu, Hiroyuki

en Fukumizu, Hiroyuki

Search repository
Suzuki, Haruka

× Suzuki, Haruka

en Suzuki, Haruka

Search repository
Toyoda, Hirotaka

× Toyoda, Hirotaka

en Toyoda, Hirotaka

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 This is the Accepted Manuscript version of an article accepted for publication in [Japanese Journal of Applied Physics]. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at [https://doi.org/10.35848/1347-4065/abd0ca]
キーワード
主題Scheme Other
主題 high-aspect hole
キーワード
主題Scheme Other
主題 charge-up
キーワード
主題Scheme Other
主題 VHF plasma
キーワード
主題Scheme Other
主題 pulse-modulated plasma
キーワード
主題Scheme Other
主題 charging current
内容記述
内容記述 Charging and discharging behavior of high aspect-ratio (AR) hole capillary plate (CP) exposed to a pulse-modulated very high frequency (VHF) capacitively-coupled plasma is investigated. From an equivalent circuit model, time-dependent charge density on the bottom of the CP is quantitatively evaluated. AR of the CP plays very important role for the charging current, although the discharge current is dominated by the leakage current of the CP. Importance of electron current flowing into the CP bottom during the VHF pulse-on phase is suggested at higher self-bias voltages.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 IOP publishing
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
関連情報
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.35848/1347-4065/abd0ca
収録物識別子
収録物識別子タイプ PISSN
収録物識別子 0021-4922
書誌情報 en : Japanese Journal of Applied Physics

巻 60, 号 1, p. 016001, 発行日 2021-01
ファイル公開日
日付 2022-01-01
日付タイプ Available
戻る
0
views
See details
Views

Versions

Ver.1 2021-09-10 02:16:54.116904
Show All versions

Share

Mendeley Twitter Facebook Print Addthis

Cite as

エクスポート

OAI-PMH
  • OAI-PMH JPCOAR
  • OAI-PMH DublinCore
  • OAI-PMH DDI
Other Formats
  • JSON
  • BIBTEX

Confirm


Powered by WEKO3


Powered by WEKO3