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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Dynamic contour error compensation in micro/nano machining of hardened steel by applying elliptical vibration sculpturing method

http://hdl.handle.net/2237/0002001686
http://hdl.handle.net/2237/0002001686
45250d47-5009-4c70-9978-75a008e456b7
名前 / ファイル ライセンス アクション
Dynamic_contour_error_compensation.pdf Dynamic_contour_error_compensation.pdf (3.5 MB)
 Download is available from 2023/8/31.
Item type itemtype_ver1(1)
公開日 2021-12-07
タイトル
タイトル Dynamic contour error compensation in micro/nano machining of hardened steel by applying elliptical vibration sculpturing method
言語 en
著者 Zhang, Jianguo

× Zhang, Jianguo

en Zhang, Jianguo

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Suzuki, Norikazu

× Suzuki, Norikazu

en Suzuki, Norikazu

Search repository
Shamoto, Eiji

× Shamoto, Eiji

en Shamoto, Eiji

Search repository
Xu, Jianfeng

× Xu, Jianfeng

en Xu, Jianfeng

Search repository
アクセス権
アクセス権 embargoed access
アクセス権URI http://purl.org/coar/access_right/c_f1cf
権利
言語 en
権利情報 © 2021. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/
キーワード
主題Scheme Other
主題 Contour error compensation
キーワード
主題Scheme Other
主題 Elliptical vibration cutting
キーワード
主題Scheme Other
主題 Inertial vibrations
キーワード
主題Scheme Other
主題 Micro/nano machining
内容記述
内容記述 In this study, a novel dynamic contour error compensation technique has been proposed for the elliptical vibration cutting process achieved through the ultra-precision amplitude control. The influence of the contour error, triggered due to the inertial vibrations of the friction-less feed drive system, on the machining accuracy deterioration has been experimentally investigated. In order to reduce the contour error, a compensation method utilizing a real-time amplitude control in the elliptical vibration cutting process has been applied. In the proposed method, the dynamic motion error along the depth of cut direction is detected by utilizing the precise linear encoders installed on the feed drive system. The motion error in real-time is subsequently converted into cancelling amplitude command for the vibration control system of the ultrasonic vibrator, thus, guaranteeing that the envelope of the vibration amplitudes auto-tracks the dynamic reference position of the motion axis in the depth of cut direction. Due to this, a constant nominal depth of cut can be obtained even though the inertial vibrations disturb the feed drive control during machining. A series of experimental investigations have been conducted in order to analyze the machining performance by employing the proposed method. The maximum machining error is observed to significantly decrease from 0.6 to 0.04 μm by applying the proposed compensation method. Finally, the micro dimple array with a structural height from about 200 to 600 nm could be accurately fabricated with a maximum machining error of 36.8 nm, which verified the feasibility of the proposed amplitude control compensation method.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 Elsevier
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
関連情報
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1016/j.precisioneng.2021.03.017
収録物識別子
収録物識別子タイプ PISSN
収録物識別子 0141-6359
書誌情報 en : Precision Engineering

巻 71, p. 250-262, 発行日 2021-09
ファイル公開日
日付 2023-09-01
日付タイプ Available
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