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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Dopant site analysis of heavily Si-doped GaAs using a combination of electron microscopy and synchrotron radiation

http://hdl.handle.net/2237/0002012841
http://hdl.handle.net/2237/0002012841
f9b59763-584e-4a7b-bab5-0c9eca95b83e
名前 / ファイル ライセンス アクション
025703_1_5_0238327.pdf 025703_1_5_0238327.pdf (1.6 MB)
アイテムタイプ itemtype_ver1(1)
公開日 2025-06-04
タイトル
タイトル Dopant site analysis of heavily Si-doped GaAs using a combination of electron microscopy and synchrotron radiation
言語 en
著者 Saito, Genki

× Saito, Genki

en Saito, Genki

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Ishizuka, Akimitsu

× Ishizuka, Akimitsu

en Ishizuka, Akimitsu

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Ohtsuka, Masahiro

× Ohtsuka, Masahiro

en Ohtsuka, Masahiro

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Ito, Shuma

× Ito, Shuma

en Ito, Shuma

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Okajima, Toshihiro

× Okajima, Toshihiro

en Okajima, Toshihiro

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Muto, Shunsuke

× Muto, Shunsuke

en Muto, Shunsuke

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アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
権利情報 © 2025 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution-NonCommercial- NoDerivs 4.0 International (CC BY-NC-ND) license (https://creativecommons.org/licenses/by-nc-nd/4.0/). https://doi.org/10.1063/5.0238327
言語 en
内容記述
内容記述タイプ Abstract
内容記述 Silicon (Si) acts as an amphoteric impurity in gallium arsenide (GaAs), occupying various sites and exhibiting different coordination structures within the material. In this study, we employed electron microscopy, x-ray absorption spectroscopy, and theoretical simulations to analyze the Si-occupied sites and local coordination structures at concentrations ranging from 2 to 4 × 1019 atoms/cm3 in heavily doped GaAs. High angular resolution electron channeling x-ray spectroscopy was employed to analyze the Si-occupied sites. This method quantitatively estimates site occupancies through statistical analysis of atom site-dependent spectra. It was observed that Si substitutes for both Ga and As sites with nearly equal occupancies. Si K-edge x-ray absorption fine structure (XAFS) measurements and density functional theory calculations were used to explore the local coordination structures of Si. The peak positions of experimental XAFS spectra aligned closely with those of the calculated XAFS spectra for neutral Si_Ga–Si_As dumbbells, particularly when Si atoms were in close proximity. Considering the effect of vacancies, the experimental XAFS peak position corresponded well with that of the calculated Si dumbbell–V_As pair. In addition, the observed pre-peak was attributed to neutral Si, likely originating from Si clusters. These findings enhance our understanding of Si-related defect structures and their influence on the properties of heavily Si-doped GaAs.
言語 en
内容記述
内容記述タイプ Other
内容記述 dataset: http://hdl.handle.net/2237/0002012811
言語 en
出版者
出版者 AIP Publishing
言語 en
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
関連情報
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/5.0238327
収録物識別子
収録物識別子タイプ PISSN
収録物識別子 0021-8979
書誌情報 en : Journal of Applied Physics

巻 137, 号 2, p. 025703, 発行日 2025-01-14
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