| アイテムタイプ |
itemtype_ver1(1) |
| 公開日 |
2025-11-28 |
| タイトル |
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|
タイトル |
Discharge characteristics of a hybrid plasma source using hot cathode arc discharge and helicon wave discharge |
|
言語 |
en |
| 著者 |
Kinashi, Yuta
Ezumi, Naomichi
Seto, Takumi
Miyauchi, Reina
Bhattarai, Hiro
Yamazaki, Tahei
Hirata, Mafumi
Kohagura, Junko
Togo, Satoshi
Sakamoto, Mizuki
Ohno, Noriyasu
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| アクセス権 |
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|
アクセス権 |
embargoed access |
|
アクセス権URI |
http://purl.org/coar/access_right/c_f1cf |
| 権利 |
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|
権利情報 |
This is the Accepted Manuscript version of an article accepted for publication in [Japanese Journal of Applied Physics]. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at [https://doi.org/10.1088/1361-6668/abcaac] |
|
言語 |
en |
| 権利 |
|
|
権利情報 |
“This Accepted Manuscript is available for reuse under a CC BY-NC-ND licence after the 12 month embargo period provided that all the terms of the licence are adhered to” |
|
言語 |
en |
| 内容記述 |
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内容記述タイプ |
Abstract |
|
内容記述 |
High-density and large-diameter plasma generation is expected to contribute to semiconductor manufacturing, space propulsion, and nuclear fusion. We develop a plasma generation method for high-density, large-diameter plasma by combining the advantages of both hot cathode arc discharge and helicon wave discharge characteristics. The experiment confirmed that hybrid discharges produce a higher-density plasma compared to standalone arc discharges or helicon wave discharges across a wide range of gas pressures. Additionally, the diameter of the plasma was found to be twice as large as that of arc discharges alone. The mechanisms behind hybrid discharge and potential performance improvements are discussed. |
|
言語 |
en |
| 出版者 |
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|
出版者 |
IOP publishing |
|
言語 |
en |
| 言語 |
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|
言語 |
eng |
| 資源タイプ |
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資源タイプresource |
http://purl.org/coar/resource_type/c_6501 |
|
タイプ |
journal article |
| 出版タイプ |
|
|
出版タイプ |
AM |
|
出版タイプResource |
http://purl.org/coar/version/c_ab4af688f83e57aa |
| 関連情報 |
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|
関連タイプ |
isVersionOf |
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|
識別子タイプ |
DOI |
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|
関連識別子 |
https://doi.org/10.35848/1347-4065/add9f5 |
| 収録物識別子 |
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収録物識別子タイプ |
PISSN |
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収録物識別子 |
0021-4922 |
| 書誌情報 |
en : Japanese Journal of Applied Physics
巻 64,
号 6,
p. 060901,
発行日 2025-06
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| ファイル公開日 |
|
|
日付 |
2026-06-01 |
|
日付タイプ |
Available |
Discharge_Characteristics_of_a_Hybrid_Plasma_Source_JJAP_revision_v2.pdf (601 KB)
