{"_buckets": {"deposit": "6d4e05d1-69d5-4873-af3d-e424460373e1"}, "_deposit": {"id": "21457", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "21457"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00021457"}, "item_10_alternative_title_19": {"attribute_name": "\u305d\u306e\u4ed6\u306e\u8a00\u8a9e\u306e\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_alternative_title": "Chemical Analysis of As^+ -implanted Ge(100)"}]}, "item_10_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2012-06-14", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "92", "bibliographicPageEnd": "67", "bibliographicPageStart": "63", "bibliographicVolumeNumber": "112", "bibliographic_titles": [{"bibliographic_title": "\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a. SDM, \u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9"}]}]}, "item_10_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "\u9ad8\u6fc3\u5ea6As^+\u30a4\u30aa\u30f3\u6ce8\u5165\u3057\u305fGe(100)\u3067\u306eAs\u306e\u6d3b\u6027\u5316\u306b\u5bfe\u3059\u308b\u77e5\u898b\u3092\u5f97\u308b\u305f\u3081\u306b\u3001\u52a0\u901f\u96fb\u572710keV,\u30c9\u30fc\u30ba\u91cf1x10^\u003c15\u003ecm^\u003c-2\u003e\u3067\u30a4\u30aa\u30f3\u6ce8\u5165\u5f8c\u3001\u71b1\u51e6\u7406\u306b\u4f34\u3046\u5316\u5b66\u69cb\u9020\u5909\u5316\u3084As\u6d3b\u6027\u5316\u72b6\u6cc1\u3092\u7cfb\u7d71\u7684\u306b\u8abf\u3079\u305f\u3002\u30a4\u30aa\u30f3\u6ce8\u5165\u306b\u3088\u308a\u3001p\u578bGe(100)\u57fa\u677f\u306e\u8868\u5c64\u6df1\u3055\u7d0419nm\u304c\u975e\u6676\u8cea\u5316\u3059\u308b\u3068\u5171\u306b\u3001\u30a2\u30af\u30bb\u30d7\u30bf\u30fc\u578b\u6b20\u9665\u6e96\u4f4d\u304c\u751f\u6210\u3055\u308c\u308b\u3053\u3068\u304c\u660e\u3089\u304b\u306b\u306a\u3063\u305f\u3002\u71b1\u51e6\u7406\u306b\u3088\u308b\u57fa\u677f\u5074\u304b\u3089\u518d\u7d50\u6676\u5316\u3068\u4f34\u3063\u3066\u3001As\u306e\u6d3b\u6027\u5316\u304c\u9032\u884c\u3057\u3001\u4e00\u90e8\u306eAs\u306f\u975e\u6676\u8cea/\u7d50\u6676\u56de\u5fa9\u5c64\u306e\u754c\u9762\u8fd1\u508d\u306b\u504f\u6790\u3059\u308b\u3053\u3068\u304c\u5206\u304b\u3063\u305f\u3002\u786cX\u7dda\u5149\u96fb\u5b50\u5206\u5149\u306b\u3088\u308a\u3001Ge\u4e2d\u306eAs\u306e\u5316\u5b66\u7d50\u5408\u72b6\u614b\u3092\u8a55\u4fa1\u3057\u305f\u7d50\u679c\u3001500\u2103\u306e\u71b1\u51e6\u7406\u5f8c\u3067\u306f\u3001\u6d3b\u6027\u5316\u3057\u305f\u6210\u5206\u306b\u76f8\u5f53\u3059\u308bAs^\u003c1+\u003e\u3068\u4e0d\u6d3b\u6027\u306a\u6210\u5206\u306b\u76f8\u5f53\u3059\u308bAs^\u003c0+\u003e\u306e\u7d50\u5408\u72b6\u614b\u304c\u5b58\u5728\u3057\u3001As^\u003c1+\u003e\u306e\u6210\u5206\u6bd4\u304b\u3089\u7b97\u51fa\u3057\u305f\u6d3b\u6027\u5316\u7387\u306f\u301c4%\u3067\u3001\u30db\u30fc\u30eb\u52b9\u679c\u6e2c\u5b9a\u7d50\u679c\u3068\u307b\u307c\u4e00\u81f4\u3059\u308b\u3053\u3068\u304c\u5206\u304b\u3063\u305f\u3002\u3053\u306e\u7d50\u679c\u306f\u3001Si\u306e\u5834\u5408\u3068\u540c\u69d8\u306b\u3001\u30af\u30e9\u30b9\u30bf\u30fc\u5f62\u6210\u306b\u3088\u308b\u6d3b\u6027\u5316\u7387\u306e\u4f4e\u4e0b\u3092\u793a\u3057\u3066\u3044\u308b\u3002As^+ ions were implanted into p-type Ge(100) at a dose of 1x10^\u003c15\u003e cm^\u003c-2\u003e and acceleration voltage of 10 keV, and an impact of activation annealing temperature on the chemical structure has been investigated systematically. After ion implantation, a formation of 19 nm-thick amorphous Ge including accepter-like defects was observed. During activation annealing in N_2 ambience, re-crystallization of amorphous Ge layer and activation of implanted As^+ ions were promoted from the substrate side. Hard x-ray photoemission spectroscopy (HAXPES) analyses of 500\u2103 annealed sample show the presence of two chemical states of As ions originating from activated As (As^\u003c1+\u003e) and inactivated As (As^\u003c0+\u003e). From the spectral deconvolution, activation ratio of implanted As ions was crudely estimated to be \u301c4%, which was almost consistent with the electrical properties.", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "URI", "subitem_identifier_uri": "http://ci.nii.ac.jp/naid/110009588307/"}, {"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/23586"}]}, "item_10_publisher_32": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "\u4e00\u822c\u793e\u56e3\u6cd5\u4eba\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a"}]}, "item_10_rights_12": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "(c)\u4e00\u822c\u793e\u56e3\u6cd5\u4eba\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a \u672c\u6587\u30c7\u30fc\u30bf\u306f\u5b66\u5354\u4f1a\u306e\u8a31\u8afe\u306b\u57fa\u3065\u304dCiNii\u304b\u3089\u8907\u88fd\u3057\u305f\u3082\u306e\u3067\u3042\u308b"}]}, "item_10_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0913-5685", "subitem_source_identifier_type": "ISSN"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "\u5c0f\u91ce, \u8cb4\u5bdb"}], "nameIdentifiers": [{"nameIdentifier": "62348", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u5927\u7530, \u6643\u751f"}], "nameIdentifiers": [{"nameIdentifier": "62349", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u6751\u4e0a, \u79c0\u6a39"}], "nameIdentifiers": [{"nameIdentifier": "62350", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u6771, \u6e05\u4e00\u90ce"}], "nameIdentifiers": [{"nameIdentifier": "62351", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u5bae\u5d0e, \u8aa0\u4e00"}], "nameIdentifiers": [{"nameIdentifier": "62352", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Ono, Takahiro"}], "nameIdentifiers": [{"nameIdentifier": "62353", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Ohta, Akio"}], "nameIdentifiers": [{"nameIdentifier": "62354", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Murakami, Hideki"}], "nameIdentifiers": [{"nameIdentifier": "62355", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Higashi, Seiichiro"}], "nameIdentifiers": [{"nameIdentifier": "62356", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Miyazaki, Seiichi"}], "nameIdentifiers": [{"nameIdentifier": "62357", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-21"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "110009588307.pdf", "filesize": [{"value": "604.0 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 604000.0, "url": {"label": "110009588307.pdf", "url": "https://nagoya.repo.nii.ac.jp/record/21457/files/110009588307.pdf"}, "version_id": "4fb753c9-f5d4-4c4f-85ca-d07c79fa4727"}]}, "item_keyword": {"attribute_name": "\u30ad\u30fc\u30ef\u30fc\u30c9", "attribute_value_mlt": [{"subitem_subject": "Ge", "subitem_subject_scheme": "Other"}, {"subitem_subject": "\u30a4\u30aa\u30f3\u6ce8\u5165", "subitem_subject_scheme": "Other"}, {"subitem_subject": "\u4e0d\u7d14\u7269\u6d3b\u6027\u5316", "subitem_subject_scheme": "Other"}, {"subitem_subject": "\u5316\u5b66\u7d50\u5408\u72b6\u614b", "subitem_subject_scheme": "Other"}, {"subitem_subject": "\u786cX\u7dda\u5149\u96fb\u5b50\u5206\u5149\u6cd5", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Ion Implantation", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Dopant Activation", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Chemical Bonding Features", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Hard X-ray Photoemission Spectroscopy (HAXPES)", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "As^+\u30a4\u30aa\u30f3\u6ce8\u5165\u3057\u305f\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u5c64\u306e\u5316\u5b66\u5206\u6790(\u30b2\u30fc\u30c8\u7d76\u7e01\u8584\u819c,\u5bb9\u91cf\u819c,\u6a5f\u80fd\u819c\u53ca\u3073\u30e1\u30e2\u30ea\u6280\u8853)", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "As^+\u30a4\u30aa\u30f3\u6ce8\u5165\u3057\u305f\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u5c64\u306e\u5316\u5b66\u5206\u6790(\u30b2\u30fc\u30c8\u7d76\u7e01\u8584\u819c,\u5bb9\u91cf\u819c,\u6a5f\u80fd\u819c\u53ca\u3073\u30e1\u30e2\u30ea\u6280\u8853)"}]}, "item_type_id": "10", "owner": "1", "path": ["320/321/322"], "permalink_uri": "http://hdl.handle.net/2237/23586", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_name_i18n": "\u516c\u958b\u65e5", "attribute_value": "2016-02-24"}, "publish_date": "2016-02-24", "publish_status": "0", "recid": "21457", "relation": {}, "relation_version_is_last": true, "title": ["As^+\u30a4\u30aa\u30f3\u6ce8\u5165\u3057\u305f\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u5c64\u306e\u5316\u5b66\u5206\u6790(\u30b2\u30fc\u30c8\u7d76\u7e01\u8584\u819c,\u5bb9\u91cf\u819c,\u6a5f\u80fd\u819c\u53ca\u3073\u30e1\u30e2\u30ea\u6280\u8853)"], "weko_shared_id": null}