@phdthesis{oai:nagoya.repo.nii.ac.jp:00024182,
 author = {LIU, Zecheng and 劉, 沢鋮},
 month = {Mar},
 school = {名古屋大学, Nagoya University},
 title = {Study on plasma etching of GaN at high temperatures for damageless fabrication of next-generation power devices},
 year = {2017}
}