@phdthesis{oai:nagoya.repo.nii.ac.jp:00025503,
 author = {ZHANG, Yan and 張, 彦},
 month = {Mar},
 school = {名古屋大学, Nagoya University},
 title = {Measurement and analysis of plasma induced damages on fabrication processes of ultra large scale integrated circuits},
 year = {2018}
}