@article{oai:nagoya.repo.nii.ac.jp:00026313, author = {Yang, Xu and Nitta, Shugo and Pristovsek, Markus and Liu, Yuhuai and Nagamatsu, Kentaro and Kushimoto, Maki and Honda, Yoshio and Amano, Hiroshi}, issue = {5}, journal = {Applied Physics Express}, month = {May}, note = {Hexagonal boron nitride (h-BN) films directly grown on c-plane sapphire substrates by pulsed-mode metalorganic vapor phase epitaxy exhibit an interlayer for growth temperatures above 1200 °C. Cross-sectional transmission electron microscopy shows that this interlayer is amorphous, while the crystalline h-BN layer above has a distinct orientational relationship with the sapphire substrate. Electron energy loss spectroscopy shows the energy-loss peaks of B and N in both the amorphous interlayer and the overlying crystalline h-BN layer, while Al and O signals are also seen in the amorphous interlayer. Thus, the interlayer forms during h-BN growth through the decomposition of the sapphire at elevated temperatures., ファイル公開:2019/05/01}, title = {Interface amorphization in hexagonal boron nitride films on sapphire substrate grown by metalorganic vapor phase epitaxy}, volume = {11}, year = {2018} }