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m-Plane GaN Schottky Barrier Diodes Fabricated With MOVPE Layer on Several Off-Angle m-Plane GaN Substrates
http://hdl.handle.net/2237/00028517
http://hdl.handle.net/2237/000285176ac14ebd-e4bf-4709-99a3-98aa0262e4b9
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2018-08-20 | |||||
タイトル | ||||||
タイトル | m-Plane GaN Schottky Barrier Diodes Fabricated With MOVPE Layer on Several Off-Angle m-Plane GaN Substrates | |||||
言語 | en | |||||
著者 |
Tanaka, Atsushi
× Tanaka, Atsushi× Ando, Yuto× Nagamatsu, Kentaro× Deki, Manato× Cheong, Heajeong× Ousmane, Barry× Kushimoto, Maki× Nitta, Shugo× Honda, Yoshio× Amano, Hiroshi |
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アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | This is the peer reviewed version of the following article: [Tanaka, A. , Ando, Y. , Nagamatsu, K. , Deki, M. , Cheong, H. , Ousmane, B. , Kushimoto, M. , Nitta, S. , Honda, Y. and Amano, H. (2018), m‐Plane GaN Schottky Barrier Diodes Fabricated With MOVPE Layer on Several Off‐Angle m‐Plane GaN Substrates. Phys. Status Solidi A, 215: 1700645. doi:10.1002/pssa.201700645], which has been published in final form at [https://doi.org/10.1002/pssa.201700645]. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Use of Self-Archived Versions. | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | GaN | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | m-plane | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Schottky barrier diode | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | facet | |||||
抄録 | ||||||
内容記述 | In this study, GaN m‐plane Schottky barrier diodes are fabricated by metalorganic vapor‐phase epitaxy (MOVPE) on several off‐angle gallium nitride (GaN) substrates, and the off‐cut angle dependence of impurity incorporation is investigated. We show that the MOVPE layer on the substrate inclined 5° toward the [000–1] direction has extremely low impurity incorporation. These results provide important suggestions for the fabrication of m‐plane power devices. | |||||
言語 | en | |||||
内容記述タイプ | Abstract | |||||
内容記述 | ||||||
内容記述 | ファイル公開:2019-05-09 | |||||
言語 | ja | |||||
内容記述タイプ | Other | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Wiley | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
出版タイプ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1002/pssa.201700645 | |||||
ISSN | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 1862-6300 | |||||
書誌情報 |
en : physica status solidi (a) 巻 215, 号 9, p. 1700645, 発行日 2018-05-09 |
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著者版フラグ | ||||||
値 | author |