{"created":"2021-03-01T06:34:26.929603+00:00","id":26524,"links":{},"metadata":{"_buckets":{"deposit":"b0b84b27-d8ae-4029-8f41-8aaea06a523a"},"_deposit":{"id":"26524","owners":[],"pid":{"revision_id":0,"type":"depid","value":"26524"},"status":"published"},"_oai":{"id":"oai:nagoya.repo.nii.ac.jp:00026524","sets":["320:606:607"]},"author_link":["87233"],"item_12_alternative_title_19":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Study on control of fine patterning in ULSI plasma processes","subitem_alternative_title_language":"en"}]},"item_12_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2018-09-27","bibliographicIssueDateType":"Issued"}}]},"item_12_date_granted_64":{"attribute_name":"学位授与年月日","attribute_value_mlt":[{"subitem_dategranted":"2018-09-27"}]},"item_12_degree_grantor_62":{"attribute_name":"学位授与機関","attribute_value_mlt":[{"subitem_degreegrantor":[{"subitem_degreegrantor_language":"ja","subitem_degreegrantor_name":"名古屋大学"},{"subitem_degreegrantor_language":"en","subitem_degreegrantor_name":"Nagoya University"}],"subitem_degreegrantor_identifier":[{"subitem_degreegrantor_identifier_name":"13901","subitem_degreegrantor_identifier_scheme":"kakenhi"}]}]},"item_12_degree_name_61":{"attribute_name":"学位名","attribute_value_mlt":[{"subitem_degreename":"博士(工学)","subitem_degreename_language":"ja"}]},"item_12_dissertation_number_65":{"attribute_name":"学位授与番号","attribute_value_mlt":[{"subitem_dissertationnumber":"甲第12498号"}]},"item_12_select_15":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"none"}]},"item_12_text_63":{"attribute_name":"学位授与年度","attribute_value_mlt":[{"subitem_text_value":"2018"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"根岸, 伸幸","creatorNameLang":"ja"}],"nameIdentifiers":[{"nameIdentifier":"87233","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-11-07"}],"displaytype":"detail","filename":"k12498_abstract.pdf","filesize":[{"value":"269.4 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"k12498_abstract","objectType":"abstract","url":"https://nagoya.repo.nii.ac.jp/record/26524/files/k12498_abstract.pdf"},"version_id":"076e68ac-1267-4eaa-90f4-0a18bf40f0d2"},{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-11-07"}],"displaytype":"detail","filename":"k12498_review.pdf","filesize":[{"value":"103.6 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"k12498_review","objectType":"other","url":"https://nagoya.repo.nii.ac.jp/record/26524/files/k12498_review.pdf"},"version_id":"1774a7e8-6e58-42bb-ae64-2301fff9ebbf"},{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-11-07"}],"displaytype":"detail","filename":"k12498_summary.pdf","filesize":[{"value":"280.4 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"k12498_summary","objectType":"summary","url":"https://nagoya.repo.nii.ac.jp/record/26524/files/k12498_summary.pdf"},"version_id":"cea93249-6548-4ff8-aff6-bdef75c3e50f"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"doctoral thesis","resourceuri":"http://purl.org/coar/resource_type/c_db06"}]},"item_title":"大規模集積回路プラズマプロセスにおける微細パターン形状制御の研究","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"大規模集積回路プラズマプロセスにおける微細パターン形状制御の研究","subitem_title_language":"ja"}]},"item_type_id":"12","owner":"1","path":["607"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2018-10-19"},"publish_date":"2018-10-19","publish_status":"0","recid":"26524","relation_version_is_last":true,"title":["大規模集積回路プラズマプロセスにおける微細パターン形状制御の研究"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-01-16T04:17:06.429032+00:00"}