@phdthesis{oai:nagoya.repo.nii.ac.jp:00026529, author = {Liu, Xiaoxu and 刘, 晓旭 and 劉, 晓旭}, month = {Sep}, school = {名古屋大学, Nagoya University}, title = {Clarification of High Wear Resistance Mechanism of ta-CNx Coating Deposited by IBA-FAD System}, year = {2018} }