@phdthesis{oai:nagoya.repo.nii.ac.jp:00027741,
 author = {SUGIURA, Hirotsugu and 杉浦, 啓嗣},
 month = {Mar},
 school = {名古屋大学, Nagoya University},
 title = {Control of Properties of Amorphous Carbon Thin Films by Internal Parameters of a Low-Temperature Plasma},
 year = {2019}
}