@phdthesis{oai:nagoya.repo.nii.ac.jp:00027743,
 author = {FUKUNAGA, Yusuke and 福永, 裕介},
 month = {Mar},
 school = {名古屋大学, Nagoya University},
 title = {Study on Etched Profile Control and the Surface Reaction for Organic Material Plasma Etching},
 year = {2019}
}