@phdthesis{oai:nagoya.repo.nii.ac.jp:00028577,
 author = {SHINODA, Kazunori and 篠田, 和典},
 month = {Sep},
 school = {名古屋大学, Nagoya University},
 title = {Studies on precisely controlled isotropic etching and its application to semiconductor device fabrication},
 year = {2019}
}