@phdthesis{oai:nagoya.repo.nii.ac.jp:00029699,
 author = {TANIDE, Atsushi and 谷出, 敦},
 month = {Mar},
 school = {名古屋大学, Nagoya University},
 title = {Study on new plasma processes for growth and etching of GaN thin films},
 year = {2020}
}