@article{oai:nagoya.repo.nii.ac.jp:00030535,
 author = {Moriyama, Makoto and Nakahara, Naoya and Mitsuya, Akihiro and Suzuki, Haruka and Kurihara, Kazuaki and Iino, Daiki and Fukumizu, Hiroyuki and Toyoda, Hirotaka},
 issue = {SJ},
 journal = {Japanese Journal of Applied Physics},
 month = {Jun},
 note = {Absolute values of the surface charge densities at the top and bottom of a capillary plate (CP) placed on a powered electrode were evaluated under the influence of pulse-modulated very high frequency (40 MHz) plasma. The peak-to-peak voltage at the top and bottom of the CP was measured using a high-voltage probe; this voltage was carefully calibrated, removing the influence of probe impedance. Based on the peak-to-peak voltage, the capacitances of the sheath and the CP were evaluated. Based on the average voltage, the surface charge density was evaluated for the plasma-on and off phases. A charge density of the order of 10^−5 C m^−2 was obtained at the bottom of the CP. Furthermore, two important observations were made during the plasma-off phase, namely: conservation of the surface charge density at the bottom of the CP and presence of the residual negative surface charge at the top of the CP., ファイル公開：2021-06-01},
 title = {Evaluation of absolute charge density at the bottom of high aspect capillary holes exposed to a pulsed very high frequency plasma},
 volume = {59},
 year = {2020}
}