@article{oai:nagoya.repo.nii.ac.jp:00004609, author = {Hirano, Shin-ichi and Yogo, Toshinobu and Sakamoto, Wataru and Kikuta, Ko-ichi and Kato, Kazumi and Takeichi, Yoshikuni and Araki, Yasushi and Saitoh, Masahiro and Ogasahara, Satoru and Kohigashi, Tetsuya and Ito, Yasuhiro and Suzuki, Kazuyuki and Ukai, Hiroyuki and 平野, 眞一 and 余語, 利信 and 坂本, 渉 and 菊田, 浩一}, journal = {Proceedings of 1999 International Symposium on Micromechatronics and Human Science (MHS '99)}, month = {Nov}, note = {Functional ceramic films have been receiving great attention because of their potentials for emerging applications, which include integrated sensors, actuators and other devices responding to magnetic, electric, optic and stress fields. Many methods, such as liquid phase epitaxial growth, chemical vapor deposition, melocular beam epitaxial growth, sputtering, lase ablation and chemical solution deposition, have been develped to fabricate thin films with desired properties. Among these methods, the chemical solution deposition method has the advantages of good homogeneity, ease of compositional control, low temperature processing, and large area and versatile csaping with integrated functionalities over vacuum deposition techniques. This paper reviews a part of the authors' results on the chemical processing of some epitaxial ferroelectric, pyroelectirc, and piezoelectric films as well as nonlinear opic films. In addition, the processing and properties of nano-sized functional ceramic perticles/organic hybrids is presented as an examples of novel and promising materials, which are expected to create a emerging area.}, pages = {11--18}, title = {Chemical processing and properties of functional ceramics}, year = {1999} }