@article{oai:nagoya.repo.nii.ac.jp:00005210, author = {Razzak, M. Abdur and Takamura, Shuichi and Uesugi, Yoshihiko}, issue = {2}, journal = {IEEE Transactions on Plasma Science}, month = {Apr}, note = {Capacitive (E) to inductive (H) mode transition dynamics in radio frequency (RF) argon inductively coupled plasmas (ICPs) with up to atmospheric pressure is studied experimentally. High-speed imaging (13500 fps) is performed to investigate the transition dynamics, and to estimate the characteristic time scale of E-H mode transition. The effect of diatomic gas inclusion (here N2) on the E-H mode transition dynamics is also discussed.}, pages = {284--285}, title = {Dynamics of E-H mode transition in high-pressure RF inductively coupled plasmas}, volume = {33}, year = {2005} }