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Diagnostics of positive and negative ions in high-density CF4 plasmas by time-of-flight mass spectrometry
http://hdl.handle.net/2237/6861
http://hdl.handle.net/2237/686155b36b70-fce9-430b-802d-af80671c0582
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
proc_pla_sci_1996_174.pdf (147.1 kB)
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| アイテムタイプ | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2006-08-25 | |||||
| タイトル | ||||||
| タイトル | Diagnostics of positive and negative ions in high-density CF4 plasmas by time-of-flight mass spectrometry | |||||
| 言語 | en | |||||
| 著者 |
Sasaki, K.
× Sasaki, K.× Ura, K.× Kadota, K. |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 権利情報 | Copyright © 1996 IEEE. Reprinted from IEEE International Conference on Plasma Science, IEEE Conference Record - Abstracts. 3-5 June 1996. p.174. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | IEEE | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1109/PLASMA.1996.550729 | |||||
| 書誌情報 |
en : IEEE International Conference on Plasma Science, IEEE Conference Record - Abstracts. 3-5 June 1996 p. 174-174, 発行日 1996-06 |
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| 値 | application/pdf | |||||
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| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/6861 | |||||
| 識別子タイプ | HDL | |||||
