@article{oai:nagoya.repo.nii.ac.jp:00005384,
 author = {Sasaki, K. and Kawai, Y. and Kadota, K.},
 issue = {11},
 journal = {Applied Physics Letters},
 month = {Mar},
 note = {Absolute densities of fluorine (F) atoms at the ground state (2p^5 ^2P°) were measured in helicon-wave excited high-density CF_4 plasmas by vacuum ultraviolet (VUV) absorption spectroscopy. By employing an electron cyclotron resonance CF_4 plasma as a light source in the VUV wavelength range, an absorption spectroscopy system with no vacuum windows was constructed. As a result, the density of F atoms was approximately 1*10^13 cm^-3 for an rf power of 1 kW and a CF_4 gas pressure of 2.5 mTorr, which was one-order higher than the density of CF_x radicals and was one-order lower than the density of the parent gas.},
 pages = {1375--1377},
 title = {Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas},
 volume = {70},
 year = {1997}
}