{"created":"2021-03-01T06:11:56.613191+00:00","id":5384,"links":{},"metadata":{"_buckets":{"deposit":"02c9714c-5760-4e09-8e46-37ca7e6bc6ba"},"_deposit":{"id":"5384","owners":[],"pid":{"revision_id":0,"type":"depid","value":"5384"},"status":"published"},"_oai":{"id":"oai:nagoya.repo.nii.ac.jp:00005384","sets":["320:321:322"]},"author_link":["13733","13734","13735"],"item_10_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1997-03-17","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"11","bibliographicPageEnd":"1377","bibliographicPageStart":"1375","bibliographicVolumeNumber":"70","bibliographic_titles":[{"bibliographic_title":"Applied Physics Letters","bibliographic_titleLang":"en"}]}]},"item_10_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Absolute densities of fluorine (F) atoms at the ground state (2p^5 ^2P°) were measured in helicon-wave excited high-density CF_4 plasmas by vacuum ultraviolet (VUV) absorption spectroscopy. By employing an electron cyclotron resonance CF_4 plasma as a light source in the VUV wavelength range, an absorption spectroscopy system with no vacuum windows was constructed. As a result, the density of F atoms was approximately 1*10^13 cm^-3 for an rf power of 1 kW and a CF_4 gas pressure of 2.5 mTorr, which was one-order higher than the density of CF_x radicals and was one-order lower than the density of the parent gas.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10_identifier_60":{"attribute_name":"URI","attribute_value_mlt":[{"subitem_identifier_type":"HDL","subitem_identifier_uri":"http://hdl.handle.net/2237/6989"}]},"item_10_publisher_32":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"American Institute of Physics","subitem_publisher_language":"en"}]},"item_10_relation_11":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isVersionOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"https://doi.org/10.1063/1.118582","subitem_relation_type_select":"DOI"}}]},"item_10_rights_12":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.","subitem_rights_language":"en"}]},"item_10_select_15":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_10_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0003-6951","subitem_source_identifier_type":"PISSN"}]},"item_10_text_14":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_text_value":"application/pdf"}]},"item_1615787544753":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"open access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_abf2"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Sasaki, K.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13733","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Kawai, Y.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13734","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Kadota, K.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13735","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-02-19"}],"displaytype":"detail","filename":"ApplPhysLett_70_1375.pdf","filesize":[{"value":"82.0 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"ApplPhysLett_70_1375.pdf","objectType":"fulltext","url":"https://nagoya.repo.nii.ac.jp/record/5384/files/ApplPhysLett_70_1375.pdf"},"version_id":"d6e7e04b-f40a-4ff0-9bde-22058a80cadf"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas","subitem_title_language":"en"}]},"item_type_id":"10","owner":"1","path":["322"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2006-10-20"},"publish_date":"2006-10-20","publish_status":"0","recid":"5384","relation_version_is_last":true,"title":["Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-01-16T03:50:04.005477+00:00"}