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Sensitive measurements of electric field distributions in low-pressure Ar plasmas by laser-induced fluorescence-dip spectroscopy
http://hdl.handle.net/2237/7000
http://hdl.handle.net/2237/70004893fbc9-8f3e-4476-b2f7-842c37fff5aa
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2006-10-20 | |||||
タイトル | ||||||
タイトル | Sensitive measurements of electric field distributions in low-pressure Ar plasmas by laser-induced fluorescence-dip spectroscopy | |||||
言語 | en | |||||
著者 |
Takizawa, K.
× Takizawa, K.× Sasaki, K.× Kono, A. |
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アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | Copyright (2004) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | |||||
抄録 | ||||||
内容記述 | Laser-induced fluorescence-dip (LIF-dip) spectroscopy of Ar was used for measuring the distributions of sheath electric fields in low-pressure, inductively-coupled Ar plasmas. A sensitive detection limit of 3 V/cm obtained by LIF-dip allowed the measurement in the presheath region. The distributions of electric fields observed experimentally were compared with those of theoretical calculations based on a simple fluid model. As a result, reasonable agreement between the experiment and the theory was obtained in the electric fields in the sheath region, while the electric fields in the presheath region observed experimentally were higher than the theoretical results. | |||||
言語 | en | |||||
内容記述タイプ | Abstract | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | American Institute of Physics | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1063/1.1639943 | |||||
ISSN | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 0003-6951 | |||||
書誌情報 |
en : Applied Physics Letters 巻 84, 号 2, p. 185-187, 発行日 2004-01-12 |
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フォーマット | ||||||
application/pdf | ||||||
著者版フラグ | ||||||
値 | publisher | |||||
URI | ||||||
識別子 | http://hdl.handle.net/2237/7000 | |||||
識別子タイプ | HDL |