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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Sensitive measurements of electric field distributions in low-pressure Ar plasmas by laser-induced fluorescence-dip spectroscopy

http://hdl.handle.net/2237/7000
http://hdl.handle.net/2237/7000
4893fbc9-8f3e-4476-b2f7-842c37fff5aa
名前 / ファイル ライセンス アクション
ApplPhysLett_84_185.pdf ApplPhysLett_84_185.pdf (164.7 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2006-10-20
タイトル
タイトル Sensitive measurements of electric field distributions in low-pressure Ar plasmas by laser-induced fluorescence-dip spectroscopy
言語 en
著者 Takizawa, K.

× Takizawa, K.

WEKO 13784

en Takizawa, K.

Search repository
Sasaki, K.

× Sasaki, K.

WEKO 13785

en Sasaki, K.

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Kono, A.

× Kono, A.

WEKO 13786

en Kono, A.

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright (2004) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
抄録
内容記述 Laser-induced fluorescence-dip (LIF-dip) spectroscopy of Ar was used for measuring the distributions of sheath electric fields in low-pressure, inductively-coupled Ar plasmas. A sensitive detection limit of 3 V/cm obtained by LIF-dip allowed the measurement in the presheath region. The distributions of electric fields observed experimentally were compared with those of theoretical calculations based on a simple fluid model. As a result, reasonable agreement between the experiment and the theory was obtained in the electric fields in the sheath region, while the electric fields in the presheath region observed experimentally were higher than the theoretical results.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 American Institute of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/1.1639943
ISSN
収録物識別子タイプ PISSN
収録物識別子 0003-6951
書誌情報 en : Applied Physics Letters

巻 84, 号 2, p. 185-187, 発行日 2004-01-12
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/7000
識別子タイプ HDL
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