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Layer structure analysis of Er δ-doped InP by x-ray crystal truncation rod scattering
http://hdl.handle.net/2237/7024
http://hdl.handle.net/2237/70244c1c1085-08bb-439d-8de5-cf5e18c36417
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
JApplPhys_82_635.pdf (235.7 kB)
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| アイテムタイプ | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2006-10-23 | |||||
| タイトル | ||||||
| タイトル | Layer structure analysis of Er δ-doped InP by x-ray crystal truncation rod scattering | |||||
| 言語 | en | |||||
| 著者 |
Takeda, Yoshikazu
× Takeda, Yoshikazu× Fujita, Keiji× Matsubara, Naoteru× Yamada, Naoki× Ichiki, Satofumi× Tabuchi, Masao× Fujiwara, Yasufumi |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 権利情報 | Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | |||||
| 言語 | en | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | The layer structure and crystal structure of an Er δ-doped layer in InP are analyzed in a one monolayer (ML) level by an x-ray crystal truncation rod (CTR) scattering measurement using synchrotron radiation. The Er δ-doped InP sample is prepared by organometallic vapor phase epitaxy using trimethylindium, tertiarybutylphosphine, and tris(methyl-cyclopentadienyl)erbium as source materials. The analysis is made by comparing the measured CTR spectra and theoretically generated ones assuming four possible crystal structures for the Er δ-doped layers. We reveal that the Er atoms in InP form the rocksalt structure ErP. In the analysis of the crystal structure the x-ray interference plays a vital role. Er distribution in the δ-doped layer is clearly resolved in 1 ML level. It is shown that the Er atoms are well confined in 5 ML(15 Å) thickness. The total amount of Er atoms is 0.171 ML, which is quite close to 0.2 ML obtained by Rutherford backscattering measurement on the same sample. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | American Institute of Physics | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1063/1.365591 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 0021-8979 | |||||
| 書誌情報 |
en : Journal of Applied Physics 巻 82, 号 2, p. 635-638, 発行日 1997-07-15 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
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| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/7024 | |||||
| 識別子タイプ | HDL | |||||
