@article{oai:nagoya.repo.nii.ac.jp:00005421,
 author = {Ikeda, M. and Ito, H. and Hiramatsu, M. and Hori, M. and Goto, T.},
 issue = {8},
 journal = {Journal of Applied Physics},
 month = {Oct},
 note = {Diamond films were successfully synthesized in both parallel-plate radio frequency (rf: 13.56 MHz) CH_4 and CH_3OH plasmas with injection of H and OH radicals generated in the remote microwave (2.45 GHz) H_2 /H_2O plasma. Effects of H, OH, and CH_3 radicals on the diamond film formation in the rf plasma reactor were investigated by the formation of diamond films employing radical injection technique and the measurement of density in the plasma. Under the condition of diamond film formation, CH_3 density was measured by infrared diode laser absorption spectroscopy (IRLAS). The kinetics of CH_3 in rf CH_4 and CH_3OH plasmas with injection of H and OH radicals were evaluated from the results of optical emission spectroscopy and lifetime of CH_3 radicals estimated by IRLAS.},
 pages = {4055--4061},
 title = {Effects of H, OH, and CH_3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor},
 volume = {82},
 year = {1997}
}